Micro array lens using optical fiber

ABSTRACT

An optical fiber micro array lens is provided along with an associated fabrication method. The micro array lens is fabricated from a mesh of optical fibers. The mesh includes a first plurality of cylindrical optical fibers. Each fiber from the first plurality has a flat bottom surface and a hemicylindrical top surface. The top and bottom surfaces are aligned in parallel with a central fiber axis. The mesh also includes a second plurality of cylindrical optical fibers. Each fiber from the second plurality has a hemicylindrical bottom surface overlying and in contact with the top surfaces of the first plurality of optical fibers, and a flat top surface. The top and bottom surfaces are aligned in parallel with a central fiber axis. Each contact of the first and second plurality of optical fibers forms a lens assembly in a micro array of lenses.

RELATED APPLICATIONS

This application is a Divisional of a patent application entitled,OPTICAL FIBER MICRO ARRAY LENS, invented by Joseph Patterson, Ser. No.12/352,640, filed Jan. 13, 2009, now U.S. Pat. No. 7,768,706 which isincorporated herein by reference.

BACKGROUND OF THE INVENTION

1. Field of the Invention

This invention generally relates to optical lens and, more particularly,to a micro array of lens assemblies made from optical fiber and anassociated fabrication process.

2. Description of the Related Art

FIG. 1 is a conventional microscope objective with condenser lens (priorart). In the visual inspection and an analysis of integrated circuit(IC), a microscope is typically employed, as the IC features can bequite small. Conventionally, a single lens is used at a localizedposition, with lighting applied to the backside of an IC or an ICembedded in a package.

The ability of a microscope objective to capture deviated light raysfrom a specimen is dependent upon both the numerical aperture (NA) andthe refractive index (n) of the medium through which the light travels,as follows:(NA)=n(sin m);

where m is one-half the angular aperture of the objective.

Because sin m cannot be greater than 90 degrees, the maximum possiblenumerical aperture is determined by the refractive index of theimmersion medium. Most microscope objectives use air as the mediumthrough which light rays must pass between the sample and front lens ofthe objective. Objectives of this type are referred to as dry objectivesbecause they are used without liquid imaging media. Air has a refractiveindex of 1.0003, very close to that of a vacuum and considerably lowerthan most liquids, including water (n=1.33), glycerin (n=1.470) andcommon microscope immersion oils (average n=1.515). The index ofrefraction of the silicon die is 3.42. Fiber optic material is alsoavailable made of silicon, with an index of refraction that perfectlymatches an IC die. For near infrared fused silica, fused quartz, or BK7,glass can be used. In practice, the maximum numerical aperture of a dryobjective system is limited to 0.95, and greater values can only beachieved using optics designed for immersion media.

Microscope objectives designed for use with immersion oil have a numberof advantages over those that are used dry. Immersion objectives aretypically of higher correction (either fluorite or apochromatic) and canhave working numerical apertures up to 1.40 when used with immersion oilhaving the proper dispersion and viscosity. These objectives allow thesubstage condenser diaphragm to be opened to a greater degree, thusextending the illumination of the specimen and taking advantage of theincreased numerical aperture.

A factor that is commonly overlooked when using oil immersion objectivesof increased numerical aperture is limitations placed on the system bythe substage condenser. In a situation where an oil objective of NA=1.40is being used to image a specimen with a substage condenser of smallernumerical aperture (1.0 for example), the lower numerical aperture ofthe condenser overrides that of the objective and the total NA of thesystem is limited to 1.0, the numerical aperture of the condenser. Onecomplicated solution to this problem is to also use an oil mediumbetween condenser lens system and the specimen.

The substage condenser gathers light from the microscope light sourceand concentrates it into a cone of light that illuminates the specimenwith uniform intensity over the entire viewfield. It is critical thatthe condenser light cone be properly adjusted to optimize the intensityand angle of light entering the objective front lens. Each time anobjective is changed, a corresponding adjustment must be performed onthe substage condenser to provide the proper light cone for thenumerical aperture of the new objective.

FIGS. 12A and 12B depict a cylindrical lens (prior art). A cylindricallens focuses light along a single axis, forming a line image fromincident parallel beams.

FIG. 13 depicts a plano-convex lens (prior art). A plano-convex lens isuseful in collimating a parallel beam from a point of light. Twoplan-convex lenses, oriented with their convex sides facing each other,act as a relay lens, and can be used to relay an image.

FIG. 2 is a diagram of a simple two-lens Abbe condenser (prior art).Light from the microscope illumination source passes through thecondenser aperture diaphragm, located at the base of the condenser, andis concentrated by internal lens elements, which then projects lightthrough the specimen in parallel bundles from every azimuth. The sizeand numerical aperture of the light cone is determined by adjustment ofthe aperture diaphragm. Correct positioning of the condenser withrelation to the cone of illumination and focus is critical toquantitative microscopy and optimum photomicrography.

While a high magnification lens may be desirable for small, narrowlydefined specimens, it may not be desirable for larger fields of view. Asa result, if a conventional high magnification microscope is used, an ICfailure or combination of connected IC features may only be understoodby finding and viewing multiple high-magnification images. Further, highmagnification lens are fragile, easily damaged, expensive, not made forlarge area viewing at low magnifications.

Generally, there is a need to efficiently collect light through the backof an IC, and transfer the light to a sensor or camera with minimalloss. With the emergence of IC back side analysis, there is a need forlenses that are compatible with the index of refraction of silicon,which is much higher than glass and air, that also have a highcollection efficiency. That is, the numerical aperture must be such thatit can be placed in contact with the planar surface of the back of thesilicon die.

It would be advantageous if a single, high magnification siliconimmersion lens (SIL) could be replaced with a micro array of lens havinga low magnification, for a larger field of view in semiconductor contactanalysis.

SUMMARY OF THE INVENTION

A micro array lens is disclosed, fabricated from optical fibers. Theinvention provides an inexpensive means to manufacture microscopicoptical array lenses for immersion or contact applications in theanalysis of semiconductors. The micro array lens can efficiently collectlight through the back of integrated circuits and transfer the light toa sensor or camera with minimal loss. The micro array lens has, an indexof refraction compatible with silicon, which is much higher than glassand air, with a high collection efficiency (numerical aperture) thatpermits the lens to be placed in contact with the planar surface of theback of the silicon die. Thus, the micro array lens can be as part of amicroscope/macroscope or camera interface, for imaging samples such asintegrated circuits.

The micro array lens is made with optical fibers. The fibers arearranged on a fixture that holds them in two parallel groups, 90 degreesto each other in an array. Both sides of the fibers are polished flat toform two plano-convex lenses in contact with each other.

Accordingly, an optical fiber micro array lens is provided. The microarray lens is fabricated from a mesh of optical fibers. The meshincludes a first plurality of cylindrical optical fibers. Each fiberfrom the first plurality has a flat bottom surface and a hemicylindricaltop surface. The top and bottom surfaces are aligned in parallel with acentral fiber axis. The mesh also includes a second plurality ofcylindrical optical fibers. Each fiber from the second plurality has ahemicylindrical bottom surface overlying and in contact with the topsurfaces of the first plurality of optical fibers, and a flat topsurface. The top and bottom surfaces are aligned in parallel with acentral fiber axis. Each contact of the first and second plurality ofoptical fibers forms a lens assembly in a micro array of lenses.

Typically, the central axes of first plurality of optical fibers areparallel to each other. The central axes of the second plurality ofoptical fibers are parallel to each other and orthogonal to the firstplurality of optical fiber central axes. In another aspect, each opticalfiber in the first and second plurality of optical fibers has ahemicylindrical radius. The mesh of optical fibers may include a spacingof up to 100% of the optical fiber hemicylindrical radius betweenadjacent optical fibers in the first plurality of optical fibers, andwith a spacing of up to 100% of the optical fiber hemicylindrical radiusbetween adjacent optical fibers in the second plurality of opticalfibers. Alternately, adjacent parallel fibers may be in contact witheach other, regardless of the depth of fiber polishing.

Additional details of the above-described micro array of lens and amethod for fabricating a micro array lens of optical fibers are providedbelow.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 is a conventional microscope objective with condenser lens (priorart).

FIG. 2 is a diagram of a simple two-lens Abbe condenser (prior art).

FIG. 3A is a plan view of an optical fiber micro array lens, while FIGS.3B and 3C are partial cross-sectional views of the micro array lens ofFIG. 3A.

FIGS. 4A and 4B are plan and partial cross-sectional views,respectively, of a variation of the optical fiber micro array lensdepicted in FIGS. 3A and 3B.

FIGS. 5A and 5B are detailed cross-sectional views depicting a singlelens assembly.

FIG. 6 is a partial cross-sectional view depicting a first variation ofthe micro array lens of FIG. 3B.

FIGS. 7A and 7B are plan and partial cross-sectional views,respectively, depicting a second variation of the micro array lens ofFIGS. 4A and 4B.

FIG. 8 is a plan view depicting the fabrication of a micro array lens ina frame.

FIG. 9 is a perspective view depicting a variation of the framestructure shown in FIG. 8.

FIGS. 10A through 10E depict steps in the fabrication of a 2-mesh microarray lens using the frame shown in FIG. 9.

FIG. 11 is a flowchart illustrating a method for fabricating an opticalfiber micro array lens.

FIGS. 12A and 12B depict a cylindrical lens (prior art).

FIG. 13 depicts a plano-convex lens (prior art).

DETAILED DESCRIPTION

FIG. 3A is a plan view of an optical fiber micro array lens, while FIGS.3B and 3C are partial cross-sectional views of the micro array lens ofFIG. 3A. The micro array lens 300 comprises a mesh 302 of opticalfibers. More explicitly, the mesh 302 includes a first plurality ofcylindrical optical fibers 304. Shown are fibers 304 a through 304 n,where n is not limited to any particular value. Each fiber 304 from thefirst plurality has a flat bottom surface 306 and a hemicylindrical topsurface 308. The top and bottom surfaces 306/308 are aligned in parallelwith a central fiber axis 310. The mesh 302 also includes a secondplurality of cylindrical optical fibers 312. Shown are fibers 312 athrough 312 p, where p is not limited to any particular value. Eachfiber 312 from the second plurality has a hemicylindrical bottom surface314 overlying and in contact with the top surfaces 306 of the firstplurality of optical fibers 304, and a flat top surface 316. The top andbottom surfaces 314/316 are aligned in parallel with a central fiberaxis 318. Each contact of the first plurality of optical fibers 304 andthe second plurality of optical fibers 312 forms a lens assembly 320 ina micro array of lenses. There are many types of optical fiber known inthe art, which can be used to enable the micro array lens.

Conventional optical fibers often include a core, a cladding layer overthe core, a buffering layer over the cladding, and a jacket overlyingthe core. In one aspect, first and second pluralities of optical fibers304/312 are optical fiber cores. Typically, the central axes 310 offirst plurality of optical fibers 304 are parallel to each other, andthe central axes 318 of the second plurality of optical fibers 312 areparallel to each other and orthogonal to the first plurality of opticalfiber central axes 310.

As shown in FIG. 3A, the mesh 302 of optical fibers includes a ring 322of fixing agent. The hardened fixing agent may be wax or epoxy. However,the lens is not limited to any particular fixing agent or means ofarranging the fibers. As shown, the ring of fixing agent 322 has aninside diameter 324 of about 1 inch. However, other diameters may alsobe useful.

In another aspect, each optical fiber in the first and second pluralityof optical fibers 304/312 has a hemicylindrical radius 326. The mesh 302of optical fibers includes a spacing 328 of up to 100% of the opticalfiber hemicylindrical radius 326 between adjacent optical fibers in thefirst plurality of optical fibers 304. Likewise there is a spacing 330of up to 100% of the optical fiber hemicylindrical radius 326 betweenadjacent optical fibers in the second plurality of optical fibers 312.Note: in other aspects not shown, the radius of the first plurality ofoptical fibers can be different than the radius of the second pluralityof optical fibers. It should also be noted that the hemispherical radius326 may be less than the optical fiber radius prior to fabrication, asexplained in more detail below. As shown in FIGS. 4A and 4B, the phantomlines associated with fibers 304 a, 304 b, and 312 depict thecross-sectional shape of the fibers prior to polishing.

FIGS. 4A and 4B are plan and partial cross-sectional views,respectively, of a variation of the optical fiber micro array lensdepicted in FIGS. 3A and 3B. In this aspect, the fibers are not polishedas deeply. As a result, parallel fibers remain touching after polishing.That is, the flat surface 306 of fiber 304 a has a width 400 about equalto twice the fiber radius 326 (as measured prior to polishing).

Alternately stated, adjacent optical fibers in the first plurality ofoptical fibers (e.g., fibers 304 a and 304 b) are in contact with eachother, and adjacent optical fibers in the second plurality of opticalfibers are in contact with each other.

FIGS. 5A and 5B are detailed cross-sectional views depicting a singlelens assembly in orthogonal planes. The lens assembly 320 has a focallength 500 responsive to the hemicylindrical radius 326 of fibers 304from the first plurality of optical fibers and fibers 312 from thesecond plurality of optical fibers. As shown in FIG. 5A, light raystraveling in a plane parallel to the Y direction are bent by fiber 304,which has a convex shape in that direction. Because the surface of fiber312 is not curved in the Y direction, rays traveling in a plane parallelto the Y direction are not bent. The focal length of each lens in theassembly is equal to 2R, and is a functions of the radius of fibercurvature. The focal length can be changed by using fibers having adifferent diameter. More explicitly, there is a front focal length and aback focal length. The front focal length is from the bottom lens to thesample focal plane=2R, and the back focal length is the distance fromthe top lens to the detector/camera when in focus, also=2R in this case.The total image transfer distance is 6R for lenses polished to half thestarting thickness. When polished further, the front and back focallengths are still 2R, but the total distance from sample to detector isless than 6R.

As shown in FIG. 5B, light rays traveling in a plane parallel to the Xdirection are not bent by fiber 304, because the fiber has no curve inthat direction. Because the surface of fiber 312 is convex in the Xdirection, rays traveling in a plane parallel to the X direction arebent. Again, the focal length is equal to 2R, and can be changed byusing fibers having a different diameter.

FIG. 6 is a partial cross-sectional view depicting a first variation ofthe micro array lens of FIG. 3B. The optical fibers in the firstplurality of optical fibers 304 and the second plurality of opticalfibers 312 each have a first index of refraction. As shown, aninterposer plate 600 has a plano surface 602 adjacent thehemicylindrical top surfaces 308 of the first plurality of opticalfibers 304 and a plano surface 604 adjacent the hemicylindrical bottomsurfaces 314 of the second plurality of optical fibers 312. Theinterposer plate 600 has a thickness 606 between plano surfaces 602 and604. Typically, the interposer plate has an index of refraction closeto, or equal to the first index of refraction. Each lens assembly (e.g.,the lens assembly formed by fibers 304 a and 312 p) now includes aportion 608 of interposer plate between corresponding fibers from thefirst and second plurality of fibers 304 and 312, and has amagnification factor responsive to the interposer plate thickness 606.Alternately but not shown, adjacent fibers in the first plurality ofoptical fibers may be in contact with each other, as shown in FIGS. 4A,4B, 7A, and 7B. Likewise, adjacent fibers in the second plurality ofoptical fibers may be in contact with each other.

FIGS. 7A and 7B are plan and partial cross-sectional views,respectively, depicting a second variation of the micro array lens ofFIGS. 4A and 4B. In the aspect however, the optical fibers in the firstplurality of optical fibers 304 have a cross-sectional width 700 acrossflat surface 306 that is less than the diameter of the optical fibersand greater than, or equal to the radius 326 of the optical fibers.Likewise, the optical fibers in the second plurality of optical fibers312 have a cross-sectional width 702 across their flat surfaces 316 thatis less than the diameter of the optical fibers and greater than, orequal to the radius of the optical fibers. Typically, the outer 25% of aspherical lens does not refocus the rays very well, so it is better ifit is removed. However, such a deep polishing creates a space betweenadjacent fibers. As explained in more detail below, the spaces can beremoved by either pushing the fibers together after polishing, orinserting additional polished fibers in the spaces between fibers.

The above-described micro array lens can be used to image through to amicroscope or camera for example, and can also be the path that theillumination light passes through when viewing the image. Generally, itsfunction is an objective lens, and its configuration is closest to acondenser lens. More explicitly, the configuration is that of a “relay”lens. It can be used to replace the function of a conventional relaylens that works at a greater distance from the specimen. Advantageously,the above-described micro array lens can be placed in contact with thesample being viewed, so it is not at a distance. It is called a relaylens because it is typically not used to magnify (1 to 2× typically),just capture the light from the sample and transfer it to a camera ordetector for viewing. Alternately stated, relay lenses do not reallymagnify the image of the sample very much, they just move the samplefocal plane to the detector focal plane unaltered. The advantage is thatmost of the light from the sample is captured because the lens is soclose that it intercepts all the light rays from the sample before theydiverge.

A condenser lens in typical applications does capture the light from asmall source like a light bulb that is spreading out in all directionsfrom a bright spot of the filament. At the output side of the lens, thelight rays are distributed out in parallel so that they can be directeddown a microscope system to illuminate the sample being viewed.

In the above-described micro array lens, each lens assembly is not acomplete plano-covex lens in that the spherical side is only sphericalin one axis. Since the other axis is linear (flat), it may be called abar lens. Bar lens are typically used as magnifiers, e.g., for readingsmall print. Each (first) fiber acts as a bar lens. But since the secondset of fibers is perpendicular to the first set of fibers, each firstfiber lens is effectively cut up into many segments the size of thesecond fiber diameter. One set of fibers focuses in one axis and theother set of fibers focuses in the other axis. The two groups of fiberscombined perform the function of one plano-convex lens. However, themicro array lens is an array of many plano-convex lens assemblies.

The magnification of each lens assembly is only one to two times and ischanged by separating the lenses (fibers). This separation can beaccomplished by placing a thin plain piece of material between the twogroups of fibers, see FIG. 6. For example, a glass interposer platemight be used for visible light. Other interposer plate materials mightalso be used, for example, material more conducive to transmittinginfrared wavelengths. The focal length of each lens (polished fiber) isdetermined by the diameter of the fiber. Note: if the convex sides ofthe fibers are faced away from each other, not shown, the micro arraylens may be more suitable as a flood source than as a point source.

Glass optical fibers are almost always made from silica, but some othermaterials, such as fluorozirconate, fluoroaluminate, and chalcogenideglasses, are used for longer-wavelength infrared applications. Likeother glasses, these glasses have a refractive index of about 1.5. Thebest material for use with semiconductor circuits is silicon. Somefibers are made of silicon for infrared applications.

FIG. 8 is a plan view depicting the fabrication of a micro array lens ina frame. In one implementation, the micro array lens is fabricated byarranging the fibers on a fixture in two parallel groups, at 90 degreesto each other in an array. Both sides of the fibers are polished flat toform two plano-convex lenses in contact with each other, as shown inFIG. 3B. It should be understood that although only a single mesh isshown secured by fixing agent ring 322, in commercial fabricationprocesses a plurality of adjoining meshes may be formed to enjoy aneconomy of scale. Note: in the interest of clarity, spaces are shownbetween adjacent parallel optical fibers. However, in actualfabrication, adjacent optical fibers are likely to be in contact alongtheir lengths.

FIG. 9 is a perspective view depicting a variation of the framestructure shown in FIG. 8. Advantageously, this frame permits 2 meshesof optical fibers to be fabricated simultaneously. In one aspect (seeFIGS. 7A and 7B), and as explained in greater detail below, such a framealso permits to meshes to be interposed between each other, to eliminatespaces between the optical fibers after polishing. Note: in the interestof clarity, spaces are shown between adjacent parallel optical fibers.However in actual fabrication, adjacent parallel optical fibers arelikely to be in contact along their lengths.

FIGS. 10A through 10E depict steps in the fabrication of a 2-mesh microarray lens using the frame shown in FIG. 9. FIG. 10A is a partialcross-sectional view of the first and second meshes after theapplication of a fixing agent and polishing operations. More explicitly,the bottom surfaces of the first plurality of optical fibers in thefirst and second meshes are polished. It should be understood thatalthough only a single mesh is shown in each frame opening, incommercial-fabrication processes a plurality of adjoining meshes may beformed to enjoy an economy of scale. Typically, the optical fibers arepolished sufficiently to form flat surfaces 306 with a cross-sectionalwidth 1000 that is less than the optical fiber diameter (twice radius326), as measured prior to polishing.

In FIG. 10B, the first and second meshes are freed from the frame, andthe top surfaces of the second plurality of optical fibers in the firstand second meshes are polished.

FIG. 10C is a perspective view of the second mesh. The first pluralityof optical fibers are separated from the second plurality of opticalfibers in the second mesh. The first plurality of optical fibers issecured as a unit of parallel fibers, with spaces between adjoiningfibers. Likewise, the second plurality of optical fibers is secured as aunit of parallel fibers, with spaces between adjoining fibers.

FIG. 10D is a partial cross-sectional view of the finished micro arraylens. The first plurality of optical fibers from the second mesh isinterposed between the first plurality of optical fibers from the firstmesh. Typically, adjacent parallel fibers are in contact with eachother.

FIG. 10E is a partial cross-sectional view of FIG. 10D showing thesecond plurality of optical fibers from the second mesh interposedbetween the second plurality of optical fibers from the first mesh.Typically, adjacent parallel fibers are in contact with each other. Aplan view of the finished product is shown in FIG. 7A.

FIG. 11 is a flowchart illustrating a method for fabricating an opticalfiber micro array lens. Although the method is depicted as a sequence ofnumbered steps for clarity, the numbering does not necessarily dictatethe order of the steps. It should be understood that some of these stepsmay be skipped, performed in parallel, or performed without therequirement of maintaining a strict order of sequence. The method startsat Step 1100.

Step 1102 provides a rigid frame structure with a perimeter. Step 1104secures the mesh of optical fibers to the frame perimeter. Step 1106forms a mesh of optical fibers. The mesh includes a first plurality ofcylindrical optical fibers underlying and in contact with a secondplurality of cylindrical optical fibers. Typically, the mesh of opticalfibers is formed from a first and second plurality optical fiber cores.Step 1108 polishes the bottom surfaces of the first plurality of opticalfibers. Step 1110 polishes the top surfaces of the second plurality ofoptical fibers. Step 1112 creates a micro array of lens assemblies.

In one aspect, forming the mesh of optical fibers in Step 1106 includesforming a first plurality optical fibers with parallel central axes, anda second plurality of optical fibers with parallel central axes, wherethe central axes of first plurality of optical fibers are orthogonal tothe central axes of the second plurality of optical fibers.

In another aspect, Step 1106 forms a mesh of first and second pluralityof optical fibers, where each fiber has a first fiber diameter. Then,polishing the bottom surfaces of the first plurality of optical fibersin Step 1108 includes creating cross-sectional flat surfaces having awidth greater than 50% of the first fiber diameter, and polishing thetop surfaces of the second plurality of optical fibers in Step 1110includes creating cross-sectional flat surfaces having a width greaterthan 50% of the first fiber diameter. Further, creating the micro arrayof lens assemblies in Step 1112 may include creating a spacing of up to50% of the first fiber diameter between adjacent optical fibers in thefirst plurality of optical fibers, and with a spacing of up to 50% ofthe first fiber diameter between adjacent optical fibers in the secondplurality of optical fibers. Note: the above-mentioned spacings aremeasured after polishing in Steps 1108 and 1110. Prior to polishing,parallel fibers are spaced less than a fiber radius apart, and may evenbe touching prior to polishing. In addition, Step 1112 creates lensassemblies having a focal length responsive to the first fiber diameter.

In another aspect, forming the mesh of optical fibers in Step 1106includes forming a first plurality of optical fibers where adjacentoptical fibers are in contact with each other, and forming a secondplurality of optical fibers where adjacent optical fibers are in contactwith each other. Each optical fiber has the first fiber diameter.Polishing the bottom surfaces of the first plurality of optical fibersin Step 1108 includes creating cross-sectional flat surfaces having awidth about equal to the first fiber diameter. Likewise, polishing thetop surfaces of the second plurality of optical fibers in Step 1110includes creating cross-sectional flat surfaces having a width aboutequal to the first fiber diameter.

In one aspect, Step 1105 deposits a ring of fixing agent (e.g., epoxy orwax) inside the frame perimeter, encasing the optical fibers. Subsequentto the fixing agent being enabled, Step 1109 breaks the attachmentbetween the optical fibers and the securing means. For example, thefiber between the ring and the frame are cut. If a single mesh frame isbeing used (see FIG. 8), Step 1109 may be performed either before orafter Step 1110.

In a different aspect, subsequent to polishing the optical fiber top andbottom surfaces in Steps 1108 and 1110, Step 1111 a disables or removesthe fixing agent. For example, if the fixing agent is wax, the wax canbe heated. Step 1111 b reduces the spacing between adjacent opticalfibers in the first plurality of optical fibers, and between adjacentoptical fibers in the second plurality of optical fibers. Step 1111 cre-enables or reapplies the fixing agent.

In another aspect, see FIGS. 9 and 10A through 10E, providing the rigidframe structure in Step 1102 includes providing a frame with a framethickness, a frame top opening, and a frame bottom opening. Securing themesh of optical fibers to the frame perimeter in Step 1104 includessecuring a first mesh in the frame top opening and a second mesh in theframe bottom opening. Each mesh includes a first and second plurality ofoptical fibers. Alternately, instead of a frame, the means used tosecure the optical fiber in Step 1104 can be an adhesive tape. Polishingthe bottom surfaces of the first plurality of optical fibers in Step1108 includes creating cross-sectional flat surfaces having across-sectional width greater than 50% of the optical fiber diameters.Polishing the top surfaces of the second plurality of optical fibers inStep 1110 includes, subsequent to the fixing agent being enabled (Step1105 and breaking the attachment between the optical fibers and theframe (Step 1109), creating cross-sectional flat surfaces having across-sectional width greater than 50% of the optical fiber diameters.

Using either the frame or tape securing means, creating the micro arrayof lens assemblies in Step 1112 includes substeps. In the second mesh,Step 1112 a separates the first plurality of optical fibers from thesecond plurality of optical fibers. Step 1112 b interposes the firstplurality of optical fibers from the second mesh between the firstplurality of optical fibers from the first mesh. Step 1112 c interposesthe second plurality of optical fibers from the second mesh between thesecond plurality of optical fibers from the first mesh;

In anther variation, Step 1106 forms a mesh from the first and secondplurality of optical fibers, each fiber having a first index ofrefraction. Prior to polishing the optical fibers, Step 1107 forms aninterposer plate having a plano surface adjacent hemicylindrical topsurfaces of the first plurality of optical fibers and a plano surfaceadjacent hemicylindrical bottom surfaces of the second plurality ofoptical fibers. The interposer plate has a thickness between planosurfaces, and typically has an index of refraction that is close to, orthe same as the first index of refraction. Then, creating the microarray of lens assemblies in Step 1112 includes each lens assembly havinga magnification factor responsive to the interposer plate thickness.

A micro array lens made from optical fibers has been provided with anassociated fabrication method. Details of parts, geometries, and processsteps have been given to illustrate the invention. However, theinvention is not limited to merely these examples. Other variations andembodiments of the invention will occur to those skilled in the art.

1. An optical fiber micro array lens comprising: a mesh of opticalfibers, the mesh including: a first plurality of cylindrical opticalfibers, each fiber from the first plurality having a flat bottom surfaceand a hemicylindrical top surface, the top and bottom surfaces alignedin parallel with a central fiber axis; and, a second plurality ofcylindrical optical fibers, each fiber from the second plurality havinga hemicylindrical bottom surface overlying and in contact with the topsurfaces of the first plurality of optical fibers, and a flat topsurface, the top and bottom surfaces aligned in parallel with a centralfiber axis; and, wherein each contact of the first and second pluralityof optical fibers forms a lens assembly in a micro array of lenses. 2.The micro array lens of claim 1 wherein the central axes of firstplurality of optical fibers are parallel to each other, the central axesof the second plurality of optical fibers are parallel to each other andorthogonal to the first plurality of optical fiber central axes.
 3. Themicro array lens of claim 2 wherein adjacent optical fibers in the firstplurality of optical fibers are in contact with each other, and adjacentoptical fibers in the second plurality of optical fibers are in contactwith each other.
 4. The micro array lens of claim 3 wherein the opticalfibers in the first and second plurality of optical fibers have across-sectional width across their flat surfaces that is less than thediameter of the optical fibers and greater than, or equal to the radiusof the optical fibers.
 5. The micro array lens of claim 2 wherein eachoptical fiber in the first and second plurality of optical fibers has ahemicylindrical radius; and, wherein the mesh of optical fibers includesa spacing of up to 100% of the optical fiber hemicylindrical radiusbetween adjacent optical fibers in the first plurality of opticalfibers, and with a spacing of up to 100% of the optical fiberhemicylindrical radius between adjacent optical fibers in the secondplurality of optical fibers.
 6. The micro array lens of claim 1 whereinthe first and second plurality of optical fibers are optical fibercores.
 7. The micro array lens of claim 1 wherein the mesh of opticalfibers includes a ring of fixing agent.
 8. The micro array lens of claim7 wherein the fixing agent is selected from a group consisting of waxand epoxy.
 9. The micro array lens of claim 1 wherein each optical fiberin the first and second plurality of optical fibers has ahemicylindrical radius; and, wherein the lens have a focal lengthresponsive to the optical fiber hemicylindrical radius.
 10. The microarray of lens of claim 1 wherein the optical fibers in the first andsecond plurality of optical fibers each have a first index ofrefraction; the micro array of lens further comprising: an interposerplate having a plano surface adjacent the hemicylindrical top surfacesof the first plurality of optical fibers and a plano surface adjacentthe hemicylindrical bottom surfaces of the second plurality of opticalfibers, the interposer plate having a thickness between plano surfacesand the first index of refraction; and, wherein each lens assemblyincludes a section of interposer plate between corresponding fibers inthe first and second plurality of fibers, and has a magnification factorresponsive to the interposer plate thickness.